DMSE 线

设备主要特点/Features：
1、水刀采用分水设计，便于出水均匀。
Water knife with water distribution design to make evenness jetting.
2、高温段采用SUS316金属齿轮，其使用寿命可达到10年左右。
SUS316 metal gear is used in high-temp module with ten years long service life.
3、高温段使用电磁流量计，从而保证流量稳定。
Electromagnetic flowmeter is used in high-temp module to ensure stable flow.
4、Permanganate段安装再生系统，延长药水寿命。
Renewable system is installed in Permanganate module thus to extend the service life of the medicine.
工艺流程/Schematic：

入板→Sweller→止水洗→冲污水→HF水洗(1)(2)(3)→清水入→检查(1)→Permanganate(1)(2)→回收水洗→HF水洗(4)(5)(6)→DI

水入→检查(2)→Neutralizer→冲污水→水刀洗(1)(2)(3)→HF水洗(7)→DI水入→整孔→水刀洗(4)(5)→HF水洗(8)(9)→DI水入→
出板→氧化→水刀洗(6)(7)(8)→HF水洗(10)→DI水入→催化→水刀洗(9)(10)(11)→HF水洗(11)→DI水入→干板组合→出板
Input→Sweller→Cycle Water Rinse→HF Rinse1,2,3→Fresh Water In→Inspection1→Permanganate(1)(2)→Reclaimed water Rinse
→HF Rinse4,5,6→DI Water In→Inspection2→Neutralizer→Waste Water Rinse→Flood Bar Rinse1,2,3→HF Rinse7→DI Water In
→Hole condition→Flood Bar Rinse4,5→HF Rinse8,9→DI Water In→Output→Oxidize→Flood Bar Rinse6,7,8→HF Rinse10→DI
Water In→Catalyze→Flood Bar Rinse9,10,11→HF Rinse11→DI Water In→Drying Module→Output